NFC
- DEP Lesker Sputter DEPOSITBUSY
- DEP Lesker Sputter VACUUMBUSY
- DEP Metal Evaporator DEPOSITBUSY
- DEP Metal Evaporator VACUUMBUSY
- ETCH ICP Metal Plasma EtcherBUSY
- ETCH PECVD/Dielectric RIEBUSY
- ETCH Reactive Ion EtcherBUSY
- LITH Photoresist Development Wet BenchBUSY
- LITH Spinner 1-- PhotoresistsBUSY
- LITH Spinner 2- SU8BUSY
- LITH Spinner 3--PhotoresistsDOWN
- LITH Suss MA6 alignerBUSY
- PKG Disco Dicing SawBUSY
- STEP Heidelberg laser writerBUSY
- STEP Nikon i-Line StepperDOWN
- WET Liftoff Solvent Wet BenchBUSY